Investigation of AlInN HEMT structures with different AlGaN buffer layers grown on sapphire substrates by MOCVD

O. KelekciP. TasliS.S. CetinM. KasapS. OzcelikE. Ozbay2024-07-112024-07-112012-1110.1016/J.CAP.2012.05.040https://acikarsiv.thk.edu.tr/handle/123456789/1987Investigation of AlInN HEMT structures with different AlGaN buffer layers grown on sapphire substrates by MOCVDjournal-article